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author:("Wen, xiaoming")
1.  Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors 
Sensors (Basel, Switzerland)  2012;12(4):5105-5115.
The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.
doi:10.3390/s120405105
PMCID: PMC3355460  PMID: 22666077
electric field sensor; charge leakage; electric field attenuation; water film thickness; MEMS

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