The development of silicon-based optoelectronics has attracted a lot of attention over the past decade [
1,
2]. The concept is based on integration of Si-based photonic components, in which light can be generated, waveguided, modulated, amplified, and detected with the advanced electronic components to realize monolithically integrated Si-based optoelectronic circuits. The study of Ge [
3-
5] and Si [
6,
7] nanostructures is motivated by the prediction that quantum confinement of carriers leads to efficient luminescence despite the indirect nature of the energy gaps. Germanium nanocrystals [NCs] have been found to exhibit visible luminescence at room temperature [
3-
5,
8,
9]. However, the mechanism of visible luminescence from Si and Ge nanocrystals is still disputed. Rare earth-doped semiconductors also have been shown to be of remarkably important for combining electronic devices with optical elements [
10]. During the last several decades, the optical properties of erbium-doped semiconductor materials have been extensively studied due to the intra-4f
4I13/2 →
4I15/2 transition (first excited state to the ground state of Er
3+ ion), which overlaps with the 1.54 μm wavelength of maximum transmission of silica-based optical fibers. Since Ge has higher electron and hole mobility, larger excitonic Bohr radius than Si [
5] and is compatible with planar Si technology, efforts are being made to study the optical properties of Er-doped Ge nanostructures.
On the other hand, flash memory with nanocrystals floating gate has received much attention because of the high-speed write/erase operation, long retention time, and small device size [
11]. Ge with a smaller band gap compared to Si is expected to improve the memory characteristics by inducing a higher valence band offset between the Si substrate and nanocrystals [
12,
13]. A thick tunnel barrier can guarantee a long retention time of the flash-memory device, but unfortunately, it slows down the programming speed. A thinner tunnel barrier will result faster programming speed but shorten the retention time. The use of a physically thicker high-permittivity oxide ensures good retention characteristics. On the other hand, thin-tunneling barriers due to the low equivalent oxide thickness allow high currents across the tunneling oxide at low control gate voltages during programming and erasing cycles [
9,
14-
16]. For Ge nanocrystals embedded in a high dielectric constant [high-k] material, the electrostatic energy is much higher due to the difference in the static dielectric constant of SiO
2 and high-k oxides [
17]. In 2003, VARIOT structured tunnel oxide was reported by Govoreanu et al. [
18] for the first time. Simulations and experimental results showed that a larger injected gate current density is possible for the memory devices with VARIOT structure tunnel barrier compared to memories with only a single-layered tunnel oxide [
18,
19].
In this paper, we report the size- and host matrix-dependent photoluminescence [PL] and electroluminescence [EL] characteristics of Ge nanocrystals. The systematic study demonstrated the origin of visible luminescence due to the quantum confinement of carriers. The temperature-dependent characteristics of 1.54 μm emission from Er-doped Ge nanocrystals are also presented. An improved charge storage characteristic for the nanocrystal in trilayer structure is reported using high-k Al2O3 and HfO2, as compared to conventional SiO2. The experimental results showed that a VARIOT tunnel stack is attractive as a replacement for the traditional single-layer tunnel barrier for improving the data retention and programming speed simultaneously.